Aligning apparatus

Details Aligning apparatus Aligning apparatus

1988-04-01

1989-11-14

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

048803081

ABSTRACT:
An apparatus for aligning a first substrate with a second substrate, comprising: means for relative movement of first and second substrates, first alignment mark means an first substrate, second alignment mark means an second substrate to be optically superposed with first alignment mark means, illumination means for instantaneously illuminating first and second alignment mark means, means for measuring the relative position of the first and second substrates in synchronization with instantaneous illumination by the illumination means, alignment optical system for forming images of first and second alignment mark means, determination means for determining positional deviation between first and second substrates from the charge distribution accumulated in images sensor means corresponding to the images of first and second alignment mark means and from the relative position measured by position measuring means, and means for driving the relative movement means according to the positional deviation.

REFERENCES:
patent: 4251160 (1981-02-01), Bouwhuis et al.

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