Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1985-09-09
1987-04-21
Evans, F. L.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
250548, 356400, G01B 1100
Patent
active
046592288
ABSTRACT:
Disclosed is an aligning apparatus in which two bodies such as a semiconductor mask and a wafer having elongate (or bar-like) alignment marks are scanned by a bar-like beam having an elongate irradiating area and further scanned by the bar-like beam with the direction of inclination thereof changed, and the positional relation between the two bodies is detected, whereby alignment of the two bodies is achieved. The bar-like beam is formed by an anamorphic optical system (for example, a cylindrical lens or the like). The bar-like beam scans the alignment marks through a beam scanning system, and the inclination of the beam is changed by beam inclination changing element at a desired time, for example, after the first cycle of scanning has been terminated, and then scanning is effected again.
REFERENCES:
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Jenkins and White, "Fundamentals of Optics" p. 245.
Suzuki Akiyoshi
Totsuka Masao
Canon Kabushiki Kaisha
Evans F. L.
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