Aligner, wafer transferring device, and semiconductor...

Details Aligner, wafer transferring device, and semiconductor... Aligner, wafer transferring device, and semiconductor...

2011-06-14

2011-06-14

Fox, Charles A (Department: 3652)

Material or article handling

Article reorienting device

Orienter has article gripping means

C414S936000

Reexamination Certificate

active

07959400

ABSTRACT:
In a preferred embodiment, an aligner includes a grip mechanism provided with a plurality of damp arms for holding an external periphery of a wafer; a rotary mechanism for rotating the grip mechanism to rotate the wafer in a prescribed rotational direction, and a lifter mechanism provided with a plurality of lift arms for lifting up the wafer above the grip mechanism. The aligner is configured to align the wafer by the grip operation of the grip mechanism and the rotary operation of the rotary mechanism, and one or more of the plurality of the lift arms which interfere with one or more of the plurality of clamp arms at the time of lifting up the plurality of lift arms are engaged with restriction members provided on the grip mechanism to prevent an upward movement thereof.

REFERENCES:
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patent: 4788994 (1988-12-01), Shinbara
patent: 5100502 (1992-03-01), Murdoch et al.
patent: 5566466 (1996-10-01), Hearne
patent: 5851041 (1998-12-01), Anderson et al.
patent: 5990650 (1999-11-01), Brock
patent: 7789614 (2010-09-01), Yoshino et al.
patent: 2004/0060195 (2004-04-01), Garcia et al.
patent: 2006/0245846 (2006-11-01), Moura et al.

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