Aligner equipped with annular illumination system for annular il

Details Aligner equipped with annular illumination system for annular il Aligner equipped with annular illumination system for annular il

1994-11-14

1997-05-13

Nguyen, Thong

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

359857, 355 53, 355 67, G02B 2710, G02B 508, G03B 2752

Patent

active

056298056

ABSTRACT:
A reduction projecting aligner preliminary forming an annular illumination light from a laser beam for increasing the illuminance transferred to the reticle and utilizing an annular illumination light that is obliquely incident on a reticle so that a pattern image of the reticle is rapidly printed on a photo-resist layer in high resolution.

REFERENCES:
patent: 5237367 (1993-08-01), Kudo
patent: 5303001 (1994-04-01), Jeong et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5335044 (1994-08-01), Shiraishi
patent: 5382999 (1995-01-01), Kamon
Keiichiro Tounai et al., "Resolution improvement with annular illumination", SPIE vol. 1674 Optical/Laser Microlithography V, 1992, pp. 753-764.
Delmer L. Fehrs et al., "Illuminator Modification of an Optical Aligner", KTI Microelectronics Seminar, 1989, pp. 217-230.
Naomasa Shiraishi et al., "New Imaging Technique for 64M-DRAM", SPIE vol. 1674 Optical/Laser Microlithography V, 1992, pp. 741-752.

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