Aligner detector including an electrooptic modulator for each di

Details Aligner detector including an electrooptic modulator for each di Aligner detector including an electrooptic modulator for each di

1998-11-13

2000-04-11

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 250237G, 2505593, G01B 902

Patent

active

060493836

ABSTRACT:
An improved aligner detector is provided. The improved aligner detector includes, a detector, several electrooptic modulators, and a refractor set, which includes several wedge patterns. Each of the electrooptic modulators includes a double-refraction transistor, which has a property of double refraction. By applying a special voltage on the double-refraction transistors, the double-refraction transistors can become transparent or opaque. Thereby, the electrooptic modulators can select a desired order of the diffraction light ray. The selected diffraction light ray is refracted by the refractor set to the detector for analysis.

REFERENCES:
patent: 4771180 (1988-09-01), Nomura
patent: 5285259 (1994-02-01), Saitoh

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