Alarm system for a crystal growing furnace

Details Alarm system for a crystal growing furnace Alarm system for a crystal growing furnace

1989-11-16

1991-11-05

Teska, Kevin J.

Boots, shoes, and leggings

219494, 340588, 364557, 374137, G06F 1546, H05B 102

Patent

active

050635182

ABSTRACT:
The present invention monitors thermocouple data from a semiconductor furnace. The data is checked against a first set of profiles which mimic an intended operational temperature profile for the furnace. If the temperature measured in any zone of the furnace falls outside a first set of maximum and minimum limits fixed by the mimicking profiles, a warning is generated thereby giving operational personnel an opportunity to correct the condition. If the condition remains unchecked and further deviation occurs, a second condition is reached as defined by a corresponding second set of mimicking maximum and minimum profiles. This condition is established as a serious condition which will cause a microprocessor to terminate power supply to the furnace. Otherwise, the quality of the grown crystal would be jeopardized; or sufficiently excessive power would be delivered to the furnace so as to cause its damage or destruction.

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