Alarm and control system for semiconductor factories or the like

Details Alarm and control system for semiconductor factories or the like Alarm and control system for semiconductor factories or the like

1984-02-21

1987-03-17

Rowland, James L.

Communications: electrical

Condition responsive indicating system

Specific condition

G08B 1710

Patent

active

046511415

ABSTRACT:
An alarm and control system for semiconductor factories or the like wherein poisonous and inflammable treatment gases such as silane gas are used as in the manufacturing process of semiconductors, etc. is disclosed. Gas detecting means are provided at locations where the treatment gases are used, the gas detecting means utilizing metal oxide semiconductors containing platinum black as a detecting element for detecting the leakage of the treatment gases.

REFERENCES:
patent: 4000089 (1976-12-01), Senda
patent: 4223692 (1980-09-01), Perry
patent: 4369031 (1983-01-01), Goldman et al.
patent: 4446718 (1984-05-01), Bukowiecki et al.
patent: 4490715 (1984-12-01), Kusanagi et al.

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