Airtight processing apparatus, airtight processing method,...

Details Airtight processing apparatus, airtight processing method,... Airtight processing apparatus, airtight processing method,...

2005-11-15

2005-11-15

Lee, John R. (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492200, C250S492300, C118S728000

Reexamination Certificate

active

06965115

ABSTRACT:
An airtight processing apparatus comprises a chamber having a side wall and a bottom wall airtightly fixed to the side wall, and a bed supported inside the chamber by the side wall with a gap from the bottom wall.

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