Air track conveyor system for disk production

Details Air track conveyor system for disk production Air track conveyor system for disk production

2001-03-16

2004-01-13

Dillon, Joseph A. (Department: 3652)

Material or article handling

Associated with semiconductor wafer handling

C406S083000, C406S089000, C406S088000, C406S154000

Reexamination Certificate

active

06676365

ABSTRACT:

FIELD OF INVENTION
The invention relates to the manufacture of magnetic and optical recording media and in particular to a method and an apparatus for transporting small form factor disks from one processing station to another.
BACKGROUND
In semiconductor processing, semiconductor wafers are transferred from one processing station to another. Semiconductor wafers have been transported by means of an air track. As illustrated in prior art
FIG. 1
, an air track
11
has a generally flat surface
12
for supporting a generally circular disc
13
. A manifold
14
in the form of a drilled opening extends along the centerline of air track
11
for receiving air under pressure to be discharged via the uniformly spaced outlets
16
at an angle having a vectorial component extending in the direction in which it is desired to transport disc
13
. The side edges
17
serve to guide disc
13
along a predetermined path.
In some systems, it is desirable to guide the paths of disc
13
without mechanical constraints such as side edges
17
because direct contact with mechanical constraints may damage and contaminate disc
13
. Contamination to disc
13
can also come from the air used to support disc
13
on air track
11
. As illustrated in prior art
FIG. 2
, the upward flow of air
18
passes around the bottom surface of disc
13
and swirls downwardly onto the top surface of the disc. Any contaminants which may have been entrained in air
18
can therefore attach to the top and bottom surfaces of disc
13
.
Thus, what is needed is an air track system optimized for transport of magnetic recording media that minimizes contact with mechanical constraints and reduces contamination from the air that supports the disk.
SUMMARY
In one embodiment of the invention, an air track includes a body having a concave top surface. In another embodiment of the invention, an air track includes a body having an air filter that divides the body into a first plenum above a second plenum. The air filter runs along the length of at least a portion of the body. In yet another embodiment, an air track includes a hood that runs above at least a portion of a top surface of a body. In yet another embodiment, an air track includes a body having a top surface with a notch located approximately at the center of the top surface.


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