Air track apparatus

Details Air track apparatus Air track apparatus

1981-12-01

1984-04-24

Love, John J.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

By load supporting jets

271195, 226 97, B65G 5102

Patent

active

044445318

ABSTRACT:
In the air track system disclosed herein, reticles used in a microlithographic imaging system are transported on an air track and are guided from one side by means of vertically directed air jets which maintain an essentially controlled gap between the edge of the reticle and a side rail extending along the track.

REFERENCES:
patent: 2805898 (1957-09-01), Willis, Jr.
patent: 3350140 (1967-10-01), Strydom
patent: 3395943 (1968-08-01), Wilde et al.
patent: 4131320 (1978-12-01), Volat et al.

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