Gas separation – Combined or convertible – In environmental air enclosure
Reexamination Certificate
2007-10-23
2007-10-23
Smith, Duane (Department: 1724)
Gas separation
Combined or convertible
In environmental air enclosure
C055SDIG034, C096S421000, C454S187000, C454S259000, C454S191000, C073S031040, C116S268000, C116S271000, C116SDIG025
Reexamination Certificate
active
11001770
ABSTRACT:
An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.
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Taiwan Search Report issued Jul. 3, 2006.
Chen Yung-Dar
Chou Jheng-Long
Huang Ming-Wen
Kuo Po-Sung
Wu Tung-Li
Pham Minh-Chau T.
Smith Duane
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
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