Ventilation – Clean room
Reexamination Certificate
2006-05-30
2006-05-30
Joyce, Harold (Department: 3749)
Ventilation
Clean room
C454S285000
Reexamination Certificate
active
07052389
ABSTRACT:
An air shower for removing a particle from an object by blowing air to the object which includes at least one first outlet for discharging the air from the at least one first outlet toward at least a portion of the object so that a flow axis of the air flowing out of the at least one first outlet is swung frequently and alternately in a first swingable direction, and at least one second outlet for discharging the air from the at least one second outlet so that a flow axis of the air flowing out of the at least one second outlet is swung frequently and alternately in a second swingable direction which is different from the first swingable direction. The first swingable direction and the second swingable direction extend so as to be non-parallel to one another and to intersect one another.
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Honda Takeshi
Matsuda Hiroshi
Mukai Hiroshi
Shimizu Yoko
Antonelli, Terry Stout and Kraus, LLP.
Hitachi , Ltd.
Hitachi Industrial Equipment Systems Co. Ltd.
Joyce Harold
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