Ventilation – Clean room
Reexamination Certificate
2005-11-01
2005-11-01
Joyce, Harold (Department: 3749)
Ventilation
Clean room
C454S285000
Reexamination Certificate
active
06960128
ABSTRACT:
In an air shower apparatus, an inlet duct guides the air so that the air is directed along a first flow axis of the air, and a variable condition area communicates fluidly with the air flowing out from the inlet duct at at least one side in a direction perpendicular to the first flow axis, to generate a fluctuation at the variable condition area in at least one of a pressure to be applied to the air flowing out from the inlet duct at the variable condition area and a mass flow rate of a supplemental air to be applied from the variable condition area onto the air flowing out of the inlet duct in a fluctuating direction oblique to the first flow axis so that a second flow axis of the air passing the variable condition area is frequently deflected from the first flow axis by the fluctuation.
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Honda Takeshi
Matsuda Hiroshi
Mukai Hiroshi
Shimizu Yoko
Antonelli Terry Stout & Kraus LLP
Hitachi Industrial Equipment Systems Co. Ltd.
Joyce Harold
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