Air lock vacuum pumping methods and apparatus

Details Air lock vacuum pumping methods and apparatus Air lock vacuum pumping methods and apparatus

1982-05-24

1985-03-12

Smith, Leonard E.

Pumps

Electrical or getter type

417 53, 137571, 2504411, F04B 3714

Patent

active

045041946

ABSTRACT:
Method and apparatus for high speed vacuum pumping of an air lock. A vacuum pumped expansion tank having a volume larger than the volume of the air lock is coupled through a valve to the air lock. When evacuation of the air lock is desired, the valve is opened for a brief duration and the gas in the air lock rapidly expands into the expansion tank. Multiple pumping stages, each including a vacuum pumped expansion tank coupled through a valve to the air lock, can be utilized to decrease the final pressure in the air lock. The valves are sequentially opened to permit sequential expansion of the gas in the air lock into the expansion tanks. Multiple air locks can time share the same pumping system.

REFERENCES:
patent: 719772 (1903-02-01), Fanta
patent: 2142514 (1939-01-01), Jones
patent: 3901183 (1975-08-01), Wittkower
patent: 3954191 (1976-05-01), Wittkower et al.
patent: 3983402 (1976-09-01), Arndt, Jr. et al.
patent: 4283631 (1981-08-01), Turner

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