Geometrical instruments – Gauge – Having a movable contact probe
Patent
1998-03-25
2000-02-29
Fulton, Christopher
Geometrical instruments
Gauge
Having a movable contact probe
33549, 33DIG2, G01B 1312, G01B 2116
Patent
active
060293616
ABSTRACT:
An air-probe structure of an air-gauge nozzle that defines an air-probe bore having an elongated, relatively small-area output tip (e.g., 0.3.times.1.3 millimeters) situated at the air-probe structure's output end. Such an air-gauge nozzle is useful in controlling the distance between the bore's output tip and a rowbar workpiece (employed in an optical microlithographic pole trimming step of the fabrication process for thin-film heads) in accordance with the air pressure measured by the air gauge. The air-probe structure's output end preferably also comprises a relatively large-area protective manifold (e.g., 6.times.7 millimeters) surrounding the elongated, relatively small-area output tip. This manifold, which protects the bore's output tip from damage which would otherwise result from inadvertent contact between the rowbar and the bore's elongated, small-area output tip, includes a set of interconnected channels to provide an escape route for air emerging from the bore's output tip and thereby prevent back pressure from being produced in the air-probe bore in response to the output end of said air-probe structure being situated in close proximity to the rowbar. A protective manifold Is also useful in protecting a conventional circular, small-area air-probe bore output tip of an air-probe structure from this type of damage. Also disclosed are air-gauge nozzles comprising a single block that, alternatively, has either two or three spaced-apart, functionally-independent air-probe structures extending from the output end of the single block.
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I. K. Badiger, et al., Theory, Development and Performance Evaluation of Back-Pressure Pneumatic Gauging System, Mechanical Engineering Bulletin, vol. 14, No. 1, 1983, pp. 14-20 (the month is unknown).
David B. Kirk, Pneumatic Gaging, Instruments and Control Systems, vol. 33, Oct. 1960, pp. 1719-1721.
David B. Kirk, Introduction to Principles of Pneumatic Gaging, American Society of Mechanical Engineers, Oct. 1, 1952, Paper No. 52-A-113.
Doan Quyen
Fulton Christopher
Jones Allston L.
Ultratech Stepper, Inc.
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