Air gaps for optical applications

Details Air gaps for optical applications Air gaps for optical applications

2007-06-05

2007-06-05

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

10179055

ABSTRACT:
An optical structure includes a substrate having two side surfaces. A first layer of high refractive index material is formed on the substrate. A sacrificial layer is formed on the first layer. A second layer of high refractive index material is formed on the sacrificial layer. At a predefined temperature the sacrificial layer is evaporated, thus forming an air gap between the first layer and the second layer.

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