Air-gap type thin-film bulk acoustic resonator and...

Details Air-gap type thin-film bulk acoustic resonator and... Air-gap type thin-film bulk acoustic resonator and...

2007-08-07

2007-08-07

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C216S017000, C029S025350, C310S324000

Reexamination Certificate

active

11130157

ABSTRACT:
An air-gap type thin-film bulk acoustic resonator. The air-gap type thin-film bulk acoustic resonator has a substrate having a cavity formed on a predetermined portion of an upper surface thereof; a resonance part having a structure of a first electrode, a piezoelectric substance, and a second electrode deposited in order and formed over the upper side of the cavity; and at least one via hole penetrating a lower surface of the substrate and connecting to the cavity.

REFERENCES:
patent: 7053456 (2006-05-01), Matsuo
patent: 2003/0015941 (2003-01-01), Nakatani et al.
patent: 2005/0218755 (2005-10-01), Song et al.
patent: 2005/0253668 (2005-11-01), Song et al.
patent: 1 291 317 (2003-03-01), None
patent: 10-2005-0098056 (2005-10-01), None

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