Air flow shielding attachment for use in projection type exposur

Details Air flow shielding attachment for use in projection type exposur Air flow shielding attachment for use in projection type exposur

1986-08-25

1988-08-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250548, H01J 4014

Patent

active

047663090

ABSTRACT:
A projection type exposure apparatus for projecting an original pattern formed on a mask onto a substrate, which comprises a projection optical system, a lens tube member for holding the projection optical system, an alignment optical system and a battle wall member disposed along the path of the projection light beam in the space between the mask and the projection optical system for shutting the space from the flow of external air.

REFERENCES:
patent: 4506977 (1985-03-01), Sato et al.
patent: 4531060 (1985-07-01), Suwa et al.
patent: 4561773 (1985-12-01), Sato
patent: 4608494 (1986-08-01), Kobayashi et al.

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