Air flow rate detector

Details Air flow rate detector Air flow rate detector

1993-04-14

1994-10-04

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

053515366

ABSTRACT:
A thermal air flow meter having therein a thermo sensitive film resistor and a charging current control circuit for controlling a current supplied to the thermo sensitive film resistor both being formed on a commom substrate by the same process technology, and the thermo sensitive film resistor unit being disposed along a direction of flow of an air to be detected.

REFERENCES:
patent: 3900819 (1975-08-01), Djorup
patent: 4399697 (1983-08-01), Kohama et al.
patent: 4449402 (1984-05-01), Eiermann et al.
patent: 4554829 (1985-11-01), Sumal
patent: 4594889 (1986-06-01), McCarthy
patent: 4776214 (1988-10-01), Moran et al.
patent: 4783996 (1988-11-01), Ohta et al.
patent: 4805452 (1989-02-01), Eiermann et al.
patent: 4825694 (1989-05-01), Weibler
patent: 4966037 (1990-10-01), Sumner et al.
patent: 5027652 (1991-07-01), Goebel et al.

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