Chemical apparatus and process disinfecting – deodorizing – preser – For deodorizing of – or chemical purification of – or... – Including solid – extended surface – fluid contact reaction...
Patent
1994-10-04
1997-03-04
Warden, Robert J.
Chemical apparatus and process disinfecting, deodorizing, preser
For deodorizing of, or chemical purification of, or...
Including solid, extended surface, fluid contact reaction...
422171, 422177, 454187, 95285, 95287, 96135, 55485, 55524, A61L 900, B01D 5334, B01D 4600, B01L 104
Patent
active
056076479
ABSTRACT:
An air filtering system for filtering air streams for use in a clean environment to effectively remove a process-limiting molecular contaminant therefrom comprising sequentially arranged upstream and downstream air filtering beds. The upstream air filtering bed is positioned to receive an air stream for use in the clean environment and comprises an upstream reagent selected to effectively remove the process-limiting molecular contaminant from the air stream as the air stream passes through the upstream air filtering bed, the upstream reagent releasing a characteristic volatile component into the air streams. The downstream air filtering bed is positioned to receive the air stream that has passed through the upstream air filtering bed and comprises a downstream reagent selected to remove the characteristic volatile component released by the upstream reagent into the air stream. Clean environments (e.g., a deep UV processing station) incorporating the above-mentioned air filtering system are also disclosed.
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Dawson E. Leigh
Extraction Systems, Inc.
Warden Robert J.
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