Air cushion conveying device with magnetic guidance

Details Air cushion conveying device with magnetic guidance Air cushion conveying device with magnetic guidance

1989-06-02

1990-12-18

Peters, Jr., Joseph F.

Conveyors: fluid current

Having means for maintaining load in suspension along flow path

By load supporting jets

406 86, 406 87, B65G 5103

Patent

active

049782533

ABSTRACT:
Device for conveying on an air cushion with magnetic guidance having a track (12) provided with air jet pipes issuing obliquely in one longitudinal direction onto its upper face, permitting the longitudinal displacement of a disk (30) without contact with the track (12). The track supports a first magnetic guidance device (34) running on its upper face. The face facing the track (12) of disk (30) is provided with a second magnetic device facing the first magnetic guidance device (34). The device is applied to the conveying of silicon wafers in an ultra-clean environment.

REFERENCES:
patent: 3610695 (1971-10-01), Yabuta
patent: 4714155 (1987-12-01), Watanabe
patent: 4718539 (1988-01-01), Fukuwatari et al.
patent: 4865491 (1989-09-01), Sakurai
Patent Abstract of Japan, vol. 8, No. 29 (M-356) p. 752 Feb. 7, 1985.
IBM Technical Disclosure, Bulletin vol. 18, No. 9 Feb. 1976.

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