Air coupled ultrasonic transducer

Details Air coupled ultrasonic transducer Air coupled ultrasonic transducer

1992-10-26

1994-02-15

Pihulic, Daniel T.

Communications, electrical: acoustic wave systems and devices

Signal transducers

29 2535, H04R 1700

Patent

active

052873315

ABSTRACT:
An acoustic transducer which is operable in air up to at least 2MHz is described. A conducting substrate, usually a silicon wafer is etched to provide a selected pattern of micro pits up to about 30 .mu.m or more deep. A dielectric film, such as a polyimide film is placed over the etched surface so as to trap air in each individual pit. A conducting upper layer is then superimposed over the dielectric film. When a potential is applied between the substrate and the upper layer the upper layer is driven into motion and enhanced by the vibrations of the air pockets. Alternatively a smooth substrate may be employed in conjunction with an etched dielectric film to achieve the same result. These transducers are useful for non-destructive testing of large structures or for medical diagnostic and therapeutic purposes, without the need for a liquid or gel coupling agent.

REFERENCES:
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4672591 (1987-06-01), Breimesser et al.
patent: 5153859 (1992-10-01), Chatigny et al.

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