Gas separation – Plural serial basically diverse separating media – Plural stages in unitary casing
Patent
1994-04-13
1996-05-07
Bushey, C. Scott
Gas separation
Plural serial basically diverse separating media
Plural stages in unitary casing
55330, 55385200, 55473, 55522, 55523, 55525, 96142, B01D 4600
Patent
active
055141960
ABSTRACT:
An air cleaning apparatus includes an air passage chamber having a suction port, from which air is sucked, and a discharge port from which the air sucked from the suction port is discharged, an air blower, provided in the air passage chamber, for sucking the air from the suction port into the air passage chamber and discharging the sucked air from the discharge port, and a particle removing mechanism for removing particles contained in the air sucked from the suction port, the entire body of the particle removing mechanism being formed of a material which generates little impurity gas detrimental to processing in a processing space.
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Matsuo Takenobu
Moriya Syuji
Tanahashi Takashi
Wakabayashi Tsuyoshi
Bushey C. Scott
Tokyo Electron Limited
Tokyo Electron Tohoku Limited
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