Air bridge wiring for semiconductor devices

Details Air bridge wiring for semiconductor devices Air bridge wiring for semiconductor devices

1988-06-17

1990-05-08

Edlow, Martin H.

357 65, 357 71, 357 45, H01L 2348

Patent

active

049242890

ABSTRACT:
A semiconductor device having an air bridge wiring structure comprising a first layer of conductors disposed on a semiconductor substrate, a plurality of bridges posts disposed on widened portions of the first layer of conductors, and bridge plates disposed straddling a plurality of bridge posts, the widened portions of the first layer of conductors being disposed at positions which are not in straight lines but are shifted with respect to each other.

REFERENCES:
patent: 3921194 (1975-11-01), Engeler et al.
patent: 3932226 (1976-01-01), Klatskin et al.
patent: 4080722 (1978-03-01), Klatskin et al.
patent: 4308090 (1981-12-01), Te Velde et al.
patent: 4651183 (1987-03-01), Lange et al.
patent: 4673966 (1987-06-01), Shimoyama
Geffken, "Multi-Level Metallurgy for Master Image Structured Logic", Dec., 1983, pp. 542-545.
"A GaAs MSI 8-bit Multiplexer and Demultiplexer", McCormack et al., GaAs IC Symposium, IEEE, 1982, pp. 25-28.

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