Air bearing piston assembly for semiconductor mask-to-wafer alig

Details Air bearing piston assembly for semiconductor mask-to-wafer alig Air bearing piston assembly for semiconductor mask-to-wafer alig

1974-08-02

1976-07-13

Spar, Robert J.

Cutlery

269 21, 269 75, 308 363, 308DIG1, F16C 704

Patent

active

039690040

ABSTRACT:
An air bearing piston assembly for semiconductor mask-to-wafer aligner which utilizes a plurality of air bearings to produce a very low friction and a very predictable force system for bringing a mask into contact and level with a semiconductor wafer. Two small driver pistons are employed to move a main piston. An outside air bearing between a rotation clamp ring and the main piston and an inside air bearing between a piston guide and the main piston produce an almost frictionless system. A third air bearing is established between a leveling ball and the ball table so that the wafer with the chunk can level accurately with a minimum of force against the mask.

REFERENCES:
patent: 3522761 (1970-08-01), Arneson, Jr.
patent: 3611697 (1971-10-01), Greb
patent: 3672733 (1972-06-01), Arsenius et al.
patent: 3677351 (1972-07-01), Geissler
patent: 3704920 (1972-12-01), Pan
patent: 3753604 (1973-08-01), Arsenius
patent: 3802086 (1974-04-01), Walker
patent: 3891015 (1975-06-01), Calcagno
patent: 3891050 (1975-06-01), Kirkpatrick et al.

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