Air bearing for MEMS based motor

Details Air bearing for MEMS based motor Air bearing for MEMS based motor

2006-08-08

2006-08-08

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C310S090000, C310S156320, C384S114000

Reexamination Certificate

active

07088019

ABSTRACT:
A MEMS (micro-electromechanical system) device having a rotor44, a stator43and a shaft27connected to the stator43and around which the rotor44rotates. Grooves47are formed in a portion of the rotor44, such that when the rotor44rotates an air bearing is formed for supporting the rotor44and maintaining its distance from the shaft27and stator43. The rotor44is formed from joining two substrates13, 23. One of the substrates13includes a surface having openings7including frustoconical walls, and one of the substrates23includes a surface having openings15including walls perpendicular to the surface of the substrate. The openings in the two substrates are in register with each other so that pairs of the openings form chambers24. Each chamber24is provided with a shaft27, which is positioned with a wide section of the shaft trapped in the chamber24. The wide section of the shaft has a frustoconical surface facing the frustoconical walls of the chamber24.

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Translation of 6-21532 by kusagi “microscopic rotation mechanism”, Jan. 1994.

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