Geometrical instruments – Straight-line light ray type – Alignment device
Reexamination Certificate
2007-02-20
2009-10-20
Bennett, G. Bradley (Department: 2841)
Geometrical instruments
Straight-line light ray type
Alignment device
C033SDIG021
Reexamination Certificate
active
07603785
ABSTRACT:
A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.
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Bennett G. Bradley
Electro Scientific Industries Inc.
Stoel Rives LLP
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