Aggregate of electronic device chips, electronic device...

Details Aggregate of electronic device chips, electronic device... Aggregate of electronic device chips, electronic device...

2005-08-18

2008-12-16

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C439S039000

Reexamination Certificate

active

07466470

ABSTRACT:
A diffraction grating light modulator composed of a plurality of diffraction grating light modulating elements formed on a substrate, each consisting of a lower electrode, belt-like fixed electrodes and movable electrodes supported above the lower electrode, and exposed connecting terminals (for electrical connection to external circuits) electrically connected to the movable electrodes, the fixed electrodes and the movable electrodes constituting a diffraction grating upon application of a voltage to the lower electrode, the diffraction grating light modulator having a protective electrode surrounding the connecting terminals, so that the diffraction grating light modulating element is certainly protected from damage by static electricity.

REFERENCES:
patent: 6121859 (2000-09-01), Takahashi
patent: 2004/0245599 (2004-12-01), Kato

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