Abrading – Machine – Sandblast
Patent
1994-11-07
1999-08-03
Rose, Robert A.
Abrading
Machine
Sandblast
451 75, 451 39, 451 53, B24C 700
Patent
active
059317213
ABSTRACT:
A scheme for removing foreign material from the surface of a substrate by directing a high velocity aerosol of at least partially frozen particles against the foreign material to be removed. Different schemes are described for accelerating the frozen particles to very high velocities sufficient for particle removal, removal of organic layers (e.g., hard baked photoresist or ion implanted photoresist) and removal of metallic layers. In one embodiment, liquid droplets are entrained in a high velocity gas flow and the resulting gas/liquid mixture is passed through an expansion nozzle to produce a high velocity aerosol of frozen particles. In another embodiment, frozen aerosol particles are entrained in, e.g., a sonic or supersonic gas jet before impacting a surface to be cleaned. The cleaning aerosols may be applied to substrates inside a vacuum chamber or directly from a hand-held device. Also, various scanning systems are described for achieving substantially uniform exposure of the substrate to the cleaning aerosol.
REFERENCES:
patent: 1899626 (1933-02-01), Miller
patent: 2699403 (1955-01-01), Courts
patent: 3074822 (1963-01-01), Walk et al.
patent: 3270464 (1966-09-01), Bowling, Jr. et al.
patent: 3545996 (1970-12-01), Duncan
patent: 3676963 (1972-07-01), Rice et al.
patent: 3702519 (1972-11-01), Rice et al.
patent: 3704822 (1972-12-01), Nomura
patent: 3708993 (1973-01-01), Hardt et al.
patent: 3934374 (1976-01-01), Leliaert
patent: 3984943 (1976-10-01), Kono et al.
patent: 4038786 (1977-08-01), Fong
patent: 4084357 (1978-04-01), Moses
patent: 4300581 (1981-11-01), Thompson
patent: 4326553 (1982-04-01), Hall
patent: 4365383 (1982-12-01), Bartlett
patent: 4389820 (1983-06-01), Fong et al.
patent: 4401131 (1983-08-01), Lawson
patent: 4439243 (1984-03-01), Titus
patent: 4458703 (1984-07-01), Inoue et al.
patent: 4500080 (1985-02-01), Aigo
patent: 4585517 (1986-04-01), Stemple
patent: 4597825 (1986-07-01), Freeouf et al.
patent: 4631250 (1986-12-01), Hayashi
patent: 4655847 (1987-04-01), Ichinoseki et al.
patent: 4663890 (1987-05-01), Brandt
patent: 4703590 (1987-11-01), Westergaard
patent: 4704873 (1987-11-01), Imaike et al.
patent: 4705438 (1987-11-01), Zimmerman et al.
patent: 4707951 (1987-11-01), Gibot et al.
patent: 4727687 (1988-03-01), Moore
patent: 4744181 (1988-05-01), Moore et al.
patent: 4747421 (1988-05-01), Hayashi
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4753051 (1988-06-01), Tano et al.
patent: 4756047 (1988-07-01), Hayashi et al.
patent: 4778559 (1988-10-01), McNeilly
patent: 4793103 (1988-12-01), Baumgart
patent: 4806171 (1989-02-01), Whitlock et al.
patent: 4817652 (1989-04-01), Liu et al.
patent: 4832753 (1989-05-01), Cherry et al.
patent: 4857142 (1989-08-01), Syverson
patent: 4870923 (1989-10-01), Sugimoto
patent: 4871651 (1989-10-01), McCune, Jr. et al.
patent: 4900395 (1990-02-01), Syverson et al.
patent: 4932168 (1990-06-01), Tada et al.
patent: 4936922 (1990-06-01), Cherry
patent: 4938815 (1990-07-01), McNeilly
patent: 4962891 (1990-10-01), Layden
patent: 4974375 (1990-12-01), Tada et al.
patent: 5001873 (1991-03-01), Rufin
patent: 5009240 (1991-04-01), Levi
patent: 5018667 (1991-05-01), Lloyd
patent: 5022961 (1991-06-01), Izumi et al.
patent: 5025597 (1991-06-01), Tada et al.
patent: 5026155 (1991-06-01), Ockovic et al.
patent: 5035750 (1991-07-01), Tada et al.
patent: 5044129 (1991-09-01), Olevitch
patent: 5044314 (1991-09-01), McNeilly
patent: 5062898 (1991-11-01), McDermott et al.
patent: 5074083 (1991-12-01), Kanno et al.
patent: 5081068 (1992-01-01), Endo et al.
patent: 5108512 (1992-04-01), Goffnett et al.
patent: 5119637 (1992-06-01), Bard et al.
patent: 5125979 (1992-06-01), Swain et al.
patent: 5147466 (1992-09-01), Ohmori et al.
patent: 5209028 (1993-05-01), McDermott et al.
patent: 5228206 (1993-07-01), Grant et al.
patent: 5231865 (1993-08-01), McDermott et al.
patent: 5234540 (1993-08-01), Grant et al.
patent: 5279705 (1994-01-01), Tanaka
patent: 5289263 (1994-02-01), Kiyokawa et al.
patent: 5315793 (1994-05-01), Peterson et al.
patent: 5364474 (1994-11-01), Williford, Jr.
patent: 5372652 (1994-12-01), Srikrishnan et al.
patent: 5409418 (1995-04-01), Krone-Schmidt, et al.
patent: 5512106 (1996-04-01), Tamai et al.
patent: 5514024 (1996-05-01), Goenka
Elizabeth A. Hill, "Carbon Dioxide Snow Examination and Experimentation", pp. 36-39, PC Feb., 1994.
Phelps et al., "Effects of Fluid Dynamics on Cleaning Efficacy of Supercritical Fluids", Prepared for U.S. Department of Energy under Contract De-AC06-76RLO 1830, Mar. 1993.
Foster et al., A Centrifuge Accelerator CO.sub.2 Pellet Cleaning System, Third Annual International Workshop on Solvent Substitution, Phoenix, Arizona, Dec. 8-11, 1992.
Peterson et al., "Jet Spray Cleaning of Optics", SPIE Proceedings Series, vol. 1754, Jul. 23-24, 1992, San Diego, California.
Tom et al., Particle Formation with Supercritical Fluids-A Review, J. Aerosol Sci., vol. 22, No. 5, pp. 555-584, 1991.
McDermott et al., "Removing Submicron Surface Particles Using a Cryogenic Argon-Aerosol Technique", pp. 33-37 Microcontamination, Oct. 1991.
Sherman et al., "Dry surface cleaning using CO.sub.2 snow", J. Vac. Sci. Technol. B., vol. 9, No. 4, Jul./Aug. 1991.
McDermott et al., "Surface Cleaning by a Cryogenic Argon Aerosol", Proceedings--Institute of Environmental Sciences, 1991.
"Cleaning with Supercritical CO.sub.2 ", NASA Tech Briefs, Dec. 1990.
Layden et al., "High velocity carbon dioxide snow for cleaning vacuum system surfaces", J. Vac. Sci. Technol. A 8 (5), Sep./Oct. 1990.
Peterson et al., "Contamination Removal by CO.sub.2 Jet Spray", SPIE Proceedings Series, vol. 1329, Jul. 10-12, 1990, San Diego, California.
Sherman et al., "The removal of hydrocarbons and silicone grease stains from silicon wafers", J. Vac. Sci. Technol. B 8 (3), May/Jun. 1990.
"Ice Scrubbing Effective, Flag Raised Over Organic-Vapor Contamination", Semiconductor International Nov. 1990.
Ohmori et al., "Ultra Clean Ice Scrubber Cleaning with Jetting Fine Ice Particles", J. Electrochem. Soc., vol. 137, No. 8, Aug. 1989.
Hoenig et al., "Control of Particulate Contamination by Thermophoresis, Electrostatics and Dry Ice Techniques", 9th ICCCS Proceedings 1988.
ARCO Bulletin, Spectra-Clean.TM. CO.sub.2.
"Cleaning Surfaces with Dry Ice", Compressed Air Magazine, Aug. 1986.
Hagena et al., "Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size and Test Gas", The Journal of Chemical Physics, vol. 56, No. 5, Mar. 1, 1972.
"Dry Ice Particles Used to Remove Contaminants", Chem. Show Preview (Before Nov. 1993).
Rose Peter H.
Sferlazzo Piero
van der Heide Robert G.
Rose Robert A.
Sumitomo Heavy Industrie's, Ltd.
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