Aerosol injection system for producing composite layers by pyrol

Details Aerosol injection system for producing composite layers by pyrol Aerosol injection system for producing composite layers by pyrol

1991-04-12

1993-03-02

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118725, 118715, 118726, 118728, C23C 1646

Patent

active

051905922

ABSTRACT:
System for the injection of a droplet aerosol containing a solute for the preparation of composite layers by pyrolysis of the solute on heated substrate (6) travelling in the muffle (2) of a furnace, characterized in that it comprises three parts, namely:

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