Aerosol deposition process

Details Aerosol deposition process Aerosol deposition process

2004-04-08

2009-08-25

Dang, Trung (Department: 2892)

Semiconductor device manufacturing: process

Forming bipolar transistor by formation or alteration of...

Including passive device

C438S330000, C257SE21004

Reexamination Certificate

active

07579251

ABSTRACT:
A circuit substrate includes a passive element and an interconnection pattern, wherein any of the passive element and the interconnection pattern is formed by an aerosol deposition process that uses aerosol of a fine particle material.

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