Aerosol cleaning method

Details Aerosol cleaning method Aerosol cleaning method

1993-06-14

1994-12-13

Straub, Gary P.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 21, 134 33, 134902, B08B 500

Patent

active

053726529

ABSTRACT:
An aerosol cleaning apparatus for cleaning a substrate includes an aerosol producing means having a nozzle head. The nozzle head is positioned at a selected proximity and orientation to the substrate which is held by a rotatable holder. The aerosol spray dislodges particles from the substrate and the rotation of the substrate further assists in the removal of the loosened particles. A method of aerosol cleaning includes rotating a substrate at a preselected speed and spraying an aerosol jet in conjunction with the rotation to help in the removal of particles from the substrate.

REFERENCES:
patent: 4617064 (1986-10-01), Moore
patent: 4747421 (1988-05-01), Hayashi
patent: 4974375 (1990-12-01), Tada et al.
patent: 5035750 (1991-07-01), Tada et al.
patent: 5062898 (1991-11-01), McDermott et al.
patent: 5147466 (1992-09-01), Ohmori et al.
patent: 5232512 (1993-09-01), Swain
"Adhesion and Removal of Fine Particles on Surfaces", M. B. Ranade, Research Triangle Institute, Aerosol Science and Technology 7:161-176 (1987).

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