Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent
1991-10-11
1994-01-11
King, Roy
Superconductor technology: apparatus, material, process
High temperature , per se
Having tc greater than or equal to 150 k
505734, 505737, 505742, 427 62, 4271263, 4272553, 4272552, 4272551, 427314, C23C 1600, B05D 512
Patent
active
052781380
ABSTRACT:
A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said
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Kodas Toivo T.
Ott Kevin C.
Cottrell Bruce H.
Gaetjens Paul D.
King Roy
Moser William R.
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