Compositions – Getters or gas or vapor generating materials for electric... – Metal or metal compound containing
Patent
1994-02-15
1994-11-01
Stoll, Robert L.
Compositions
Getters or gas or vapor generating materials for electric...
Metal or metal compound containing
2521811, 445 55, 502233, 502405, 502407, 502439, 210188, 210407, 2105021, 437 10, 437 12, 423210, 4232155, 454187, 355300, 422 4, 422120, 96154, H01J 1718, B01D 4900, B01D 5302, H01L 21306, A61L 900, G03G 2100
Patent
active
053605721
ABSTRACT:
A porous light-weight getter which collects particulate and molecular contaminates that is believed a significant improvement over the prior art is provided in which a metal mesh matrix is coated with a low-density porous aerogel. In the prior art bare metal mesh matrices have been employed as getters, which are subject to ablation from high-velocity contaminant particles. In the composite getter of the present invention, the low-density aerogel coating protects the enclosed metal matrix from ablation and also can attract and hold the incoming high-velocity particle. On its part, the metal mesh provides reinforcing support to the aerogel covering and also good thermal conductivity therein so that such covering can be cooled to the low temperatures that attract such contaminants. The invention further provides method for manufacture of the composite getters of the invention. Such composite getters are useful in decontamination in semiconductor manufacturing processes and storage thereof and in decontaminating optical systems including a space-based telescope.
In other embodiments, the getter of the invention can be mounted in air ducts to serve as a filter therefor, can be mounted in a photocopier for capture of toner fog, can be mounted in areas of semiconductor manufacturing for collecting contaminates proximate thereto, can be mounted in operating rooms, cleanrooms, in storage areas for surgical instruments, in spacecraft and the like for decontamination thereof.
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Dykeman Deidra A.
Hotaling Steven P.
Anthony Joseph D.
Singer Donald J.
Stoll Robert L.
Stover Thomas C.
The United States of America as represented by the Secretary of
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