Advancing means for a multi-coordinate measurement table of...

Details Advancing means for a multi-coordinate measurement table of... Advancing means for a multi-coordinate measurement table of...

2008-07-09

2011-11-15

Hannon, Thomas R (Department: 3656)

Machine element or mechanism

Control lever and linkage systems

Multiple controlling elements for single controlled element

Reexamination Certificate

active

08056434

ABSTRACT:
An advancing means for a multi-coordinate measurement table including a drive unit having a friction rod and a motor for each coordinate axis (x, y). The motor contacts one side of the friction rod with its motor shaft and at least one press roller contacts the other side of the friction rod. At least one pressing means is provided biasing the press roller, the friction rod and the motor shaft against each other with a pressing force, whereby the motor shaft frictionally engages the friction rod and converts the rotational movement of the motor into a linear movement of the friction rod. A method for controlling such an advancing means is disclosed as well.

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Roth, K.-D. and Rinn, K. “Mask Metrology for High End Semiconductor Application Using the LEICA LMS IPRO,” Scientific and Technical Information, vol. XI, No. 5, pp. 130-135, Leica Mikroskopie and Systeme GmbH, Wetzlar/Germany (Oct. 1997).

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