Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-02-14
2006-02-14
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06999181
ABSTRACT:
A method is described that involves tracking a fringe line disturbance that has breached its field of reference. The method also involves translating each pixel location of the tracked fringe line disturbance to an x,y,zsdata point. x and y represent a position on the plane of an interferometer's sample stage. zsrepresents the height of a sample above the x,y position. The sample is placed upon the sample stage of an inteferometer so as to create the fringe line disturbance. The fringe line disturbance is observed on the interferometer's detector.
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Angstrovision, Inc.
Blakely , Sokoloff, Taylor & Zafman LLP
Lyons Michael A.
Turner Samuel A.
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