Advanced-process-control system utilizing a lambda tuner

Details Advanced-process-control system utilizing a lambda tuner Advanced-process-control system utilizing a lambda tuner

2007-12-31

2010-10-05

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S029000, C700S033000, C700S051000, C703S002000, C702S179000

Reexamination Certificate

active

07809459

ABSTRACT:
An advanced process control (APC) system. The APC system comprises a database for receiving process data from a measurement tool for a plurality of process runs and for storing the process data. A lambda tuner determines a tuned-lambda value corresponding to a process-capability-index value based on upper and lower process control limits and statistics derived from the process data. A process-run controller updates a recipe value based on the received process data and the tuned-lambda value.

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