Advanced power device process for low drop

Fishing – trapping – and vermin destroying

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437141, H01L 21306, H01L 2122, H01L 2138

Patent

active

055433359

ABSTRACT:
A method for fabricating a power semiconductor device with a low forward voltage drop using polymer passivation. A polymer passivation layer is deposited over the device. Impurities are introduced into the backside of the device by ion implantation, the backside of the device being on the opposite side of the semiconductor device from the polymer passivation layer. The impurities are then diffused into the semiconductor device.

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