Advanced ion beam detector for ion implantation tools

Details Advanced ion beam detector for ion implantation tools Advanced ion beam detector for ion implantation tools

2006-04-11

2006-04-11

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S492210

Reexamination Certificate

active

07026628

ABSTRACT:
The present invention provides an improved Faraday cup configuration that allows determination of a non-zero angle of incidence and/or a beam divergence with high accuracy. Moreover, by substantially simultaneously and continuously displaying information of a plurality of Faraday cups, the set-up of an implantation tool may be significantly facilitated and may be carried out in a substantially automated manner.

REFERENCES:
patent: 4816693 (1989-03-01), Rathmell
patent: 5068539 (1991-11-01), Nogami et al.
patent: 5903002 (1999-05-01), Turner et al.
patent: 6614027 (2003-09-01), Iwasawa
patent: 02051836 (1990-02-01), None
patent: 2000065942 (2000-03-01), None
patent: WO 01/51183 (2001-07-01), None
US 6,316,775, 11/2001, Nasser-Ghodsi (withdrawn)

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