Abrading – Machine – Endless band tool
Reexamination Certificate
2005-02-22
2005-02-22
Thomas, David B. (Department: 3723)
Abrading
Machine
Endless band tool
C451S288000, C451S006000
Reexamination Certificate
active
06857947
ABSTRACT:
An apparatus for polishing a workpiece includes a workpiece holder configured to hold the workpiece, a polishing member configured to be positioned adjacent to a face of the workpiece in order to polish the workpiece face with a front side of the polishing member, and a platen having a plurality of pressure zones configured to selectively apply pressure to the polishing member thereby causing the polishing member to contact the workpiece face with selective pressure. In another embodiment, the apparatus includes a pressure controller coupled to the platen and configured to selectively adjust the pressure zones.
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Basol Bulent M.
Desai Mukesh
Frey Bernard M.
McGrath Brett E.
Talieh Homayoun
ASM NuTool, Inc
Knobbe Martens Olson & Bear LLP
Thomas David B.
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