Adjustment of a microscope

Optical: systems and elements – Compound lens system – Microscope

Reexamination Certificate

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Details

C359S368000, C359S383000, C359S385000

Reexamination Certificate

active

11327783

ABSTRACT:
In adjusting a microscope having at least two objectives for superimposing measuring beams of light in an object space to the end of obtaining an interference pattern and for monitoring the object space, each objective having a focal point, a focal plane and a pupil, auxiliary beams of light which are distinguishable from the measuring beams are directed into the objectives, and the auxiliary beams getting back out of the objectives are superimposed to obtain an auxiliary interference pattern. Further, the auxiliary beams getting back out of the objectives are imaged as spots.

REFERENCES:
patent: 3825349 (1974-07-01), Nomarski
patent: 5671085 (1997-09-01), Gustafsson et al.
patent: 6862137 (2005-03-01), Ott
patent: 2004/0114225 (2004-06-01), Engelhardt et al.
patent: 4040441 (1992-07-01), None
patent: 19914049 (2000-10-01), None
patent: 0491289 (1996-04-01), None

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