Adjustment method for position detection apparatus, exposure...

Details Adjustment method for position detection apparatus, exposure... Adjustment method for position detection apparatus, exposure...

2008-07-08

2011-11-01

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By alignment in lateral direction

With light detector

C356S124000, C356S614000

Reexamination Certificate

active

08049891

ABSTRACT:
The present invention provides an adjustment method for a position detection apparatus which comprises an optical system including first and second optical members whose positions can be changed, and detects a position of an object, comprising the steps of calculating a value representing an asymmetry of a detection signal of a light which enters a photoelectric conversion device via the optical system, for each of a plurality of positions of the first optical member in a direction perpendicular to an optical axis of the optical system, specifying a position of the object in the direction of the optical axis, at which the value is insensitive, for each of the plurality of positions, and adjusting a position of the second optical member in the direction perpendicular to the optical axis based on the value at the position of the object specified in the specifying step.

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patent: 09-167738 (1997-06-01), None

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