Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1998-04-01
1999-10-19
Ramirez, Nestor
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
359224, 359199, 310 40MM, H02K 3300, G02B 2608
Patent
active
059694653
ABSTRACT:
An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member from which project a first pair of axially aligned torsion bars. A first dynamic member, coupled to and supported from the reference member by the torsion bars, oscillates in one-dimension about the torsion bar's axis. A second dynamic member may be supported from the first dynamic member by a second pair of axially aligned torsion bars for two-dimensional oscillation. The dynamic members respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member. Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.
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Downing Philip
Neukermans Armand P.
Slater Timothy G.
Mullins B.
Ramirez Nestor
Schreiber Donald E.
Xros, Inc.
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