Adjusting a sampling protocol in an adaptive control process

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S109000, C438S014000

Reexamination Certificate

active

07050879

ABSTRACT:
A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.

REFERENCES:
patent: 2004/0173581 (2004-09-01), Udo et al.
patent: 2005/0033467 (2005-02-01), Purdy
patent: 2005/0107971 (2005-05-01), Ritzdorf et al.

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