Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-05-23
2006-05-23
Bahta, Kidest (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S109000, C438S014000
Reexamination Certificate
active
07050879
ABSTRACT:
A method and an apparatus are provided for adjusting a sampling protocol in an adaptive control process. The method comprises determining a performance value based on a measurement associated with at least one or more previously processed workpieces, adjusting a sampling protocol for one or more processed workpieces based on the determined performance value, and measuring the one or more processed workpieces according to the sampling protocol to provide one or more measurements. The method further comprises adjusting at least one of a process model and a control parameter based on at least a portion of the one or more measurements.
REFERENCES:
patent: 2004/0173581 (2004-09-01), Udo et al.
patent: 2005/0033467 (2005-02-01), Purdy
patent: 2005/0107971 (2005-05-01), Ritzdorf et al.
Cherry Gregory A.
Wang Jin
Advanced Micro Devices , Inc.
Bahta Kidest
Williams Morgan & Amerson, LLP
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