Adjustable X-Y stage

Details Adjustable X-Y stage Adjustable X-Y stage

1992-06-03

1994-01-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310331, 385137, 356350, H01L 4108

Patent

active

052818845

ABSTRACT:
An adjustable X-Y stage (10) comprises a single monolithic member from which regions have been cut to define a central mounting portion (19), a peripheral frame portion (20) a plurality of moveable portions (21), each located between the central mounting portion and the peripheral frame portion, a plurality of first spring portions (22), each interconnecting one of the moveable portions to the central mounting portion, and a plurality of second spring portions (23), each being adjacent a moveable portion and each interconnecting the peripheral frame portion to the central mounting portion. A plurality of screws (12-15), each adapted to extend through the peripheral frame portion (20), engages one of the moveable portions (21) to permit adjustments of the central mounting portion (19) in transverse X and Y directions.

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