Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1996-05-14
1998-04-07
Werner, Frank E.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
414937, 414417, 414404, 211 157, B65G 110
Patent
active
057356629
ABSTRACT:
A adjustable wafer transfer machine that includes an adjusting mechanism for changing the spacing between adjacent wafers to accommodate placement of the wafers in either a smaller wafer carrier or a larger wafer carrier and a transfer mechanism for transferring the wafers between the smaller wafer carrier and the adjusting mechanism and for transferring the wafers between the larger wafer carrier and the adjusting mechanism. The adjusting mechanism comprises a pair of flat plates disposed parallel to and opposite one another and a plurality of elongated opposing dividers slidably mounted on the plates. The dividers are disposed vertically adjacent to one another at spaced apart intervals and they extend horizontally to support the wafers along a portion of their perimeter. A positioning mechanism is operatively coupled to the dividers for changing the spacing between the dividers and, correspondingly, between the wafers supported on the dividers.
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patent: 4329928 (1982-05-01), Shaw
patent: 4506455 (1985-03-01), Rossi
patent: 4597819 (1986-07-01), Kusuhara et al.
patent: 5211296 (1993-05-01), D'Heygere
H-Square Corporation 1994-1995 Edition pp. 8-1 through 8-4.
Malmin, Jr. Leo L.
Nichols Ernest C.
Micro)n Technology, Inc.
Werner Frank E.
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