Supports – Stand – To hold a particular article
Patent
1996-06-28
1998-07-14
Aubrey, Beth A.
Supports
Stand
To hold a particular article
269309, 269903, F16M 1104
Patent
active
057792038
ABSTRACT:
The present invention relates, generally to a wafer cassette holding mechanism for use in processing wafers. The cassette holding mechanism has adjustable alignment posts to facilitate the cassette placement, and an adjustment guide for guiding the placement of the cassette on the holding mechanism so that the holding mechanism may be configured to receive and securely hold a variety of different sizes and brands of wafer cassettes. In addition, the cassette holding mechanism further includes a plurality of adjustment screws for fine tuning the level position of the support platform.
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Brown et al., "Substrate Handling Apparatus", Western Electric Technical Digest, No. 45, Jan. 1977, entire document.
"Universal Wafer-Boat-Alignment Fixture", IBM Technical Disclosure Bulletin, vol. 28, No. 11, Apr. 1986, entire document.
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