Adjustable two dimensional lamellar grating

Details Adjustable two dimensional lamellar grating Adjustable two dimensional lamellar grating

2009-06-12

2011-12-20

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

C359S223100, C359S566000

Reexamination Certificate

active

08081319

ABSTRACT:
An adjustable two-dimensional lamellar grating system including a lamellar grating and a movable mirror disposed substantially parallel to one another, and an interferometer using the adjustable lamellar grating system. In one example, the lamellar grating includes a dielectric wafer having a dielectric wafer having a plurality of periodically spaced recesses formed therein, wherein the dielectric wafer has higher reflectivity at its surface facing the movable mirror than at a second opposing surface. In one example, the system also includes a mechanism for moving the mirror relative to the dielectric wafer.

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patent: 2009/0279172 (2009-11-01), Higashi
Manzardo, O. et al., “Minature Lamellar grating Interferometer Based on Silicon Technology”, Opt. Lett, 29, 1437 (2004).
Strong, J. et al., “Lamellar Grating Far-Infrared Interferometer,” J. Opt. Soc. Am. 50, 113 (1960).
Manzardo, Omar et al., “Infra-Red MEMS-Based Lamellar Grating Spectrometer,” 2004, SPIE Proceedings, vol. 5455, pp. 1-8.

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