Coherent light generators – Particular active media – Gas
Reexamination Certificate
2006-06-27
2006-06-27
Menefee, James (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S055000
Reexamination Certificate
active
07068697
ABSTRACT:
A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.
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Amada Yoshiho
Moosman Bryan G.
Morton Richard G.
Cray William C.
Cymer Inc.
Hillman Matthew K.
Menefee James
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