Electric heating – Metal heating – By arc
Reexamination Certificate
2006-09-22
2010-11-09
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121520, C156S345470, C156S345340, C118S7230IR
Reexamination Certificate
active
07829815
ABSTRACT:
A adjustable upper coil or electrode for a reaction chamber apparatus useable in semiconductor processing, is constructed so that its shape may be selectively changed or so at least two portions thereof may be selectively driven at different power and/or frequencies. The adjustable upper coil or electrode, therefore, enables the plasma density distribution in the reaction chamber apparatus to be selectively controlled.
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Taiwanese Office Action dated Apr. 28, 2010.
Chinese Office Action dated Jun. 1, 2010.
TW Office Action issued Jul. 30, 2010.
Chen Po-Zen
Chen Ying-Lin
Hsiao Yi-Li
Kao Chi-An
Sheu Lawrance
Duane Morris LLP
Paschall Mark H
Taiwan Semiconductor Manufacturing Co. Ltd.
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